青云英语翻译

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为了制备高质量的ZnO薄膜,各种技术已被用于例如分子束外延(MBE ),10有机金属化学气相沉积法, 11化学气相沉积(CVD) , 12pulsed激光淀积, 13的磁控管sputtering.14然而,这些技术

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制备高质量 ZnO 薄膜,如分子束外延 (MBE) 10 金属有机物化学气相沉积、 11 化学气相沉积 (CVD)、 12pulsed 激光沉积,13 磁控 sputtering.14 然而已使用各种技术,这些技术通常需要生长温度高 (350 C) 以上。原子层沉积 (ALD) 是另一种方式为生长高质量 ZnO 薄膜。它是一个表面的控制的过程的精度原子层沉积材料和提供了许多优势,包括准确的厚度控制、 重现性好、 覆盖面大面积衬底、 优秀的整合和生产急剧接口的能力。此外,它是有益的薄膜生长在较低温度下比传统的 CVD 技术。许多研究者已经发现在 Si,15GaN 上沉积 ZnO 薄膜 (Ref.

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要准备优质ZnO影片,各种各样的技术用于例如分子束外延(MBE), 10种金属有机化学气相沉积, 11化学气相沉积(CVD)然而, 12pulsed激光证言, 13磁控管sputtering.14,这些技术通常要求一个高速增长温度(在350C上)。原子层数证言(ALD)是生长的优质ZnO影片一个可供选择的方法。

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